NCD contracted with Samsung Electronics Co., Ltd. to supply Lucida M200PL-C ALD System > [english] News | 엔씨디

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NCD contracted with Samsung Electronics Co., Ltd. to supply Lucida M200PL-C ALD System

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<Lucida M200PL-C ALD System>

NCD has recently contracted with Samsung Electronics Co., Ltd. to supply ALD cluster system for semiconductor process. This system is ALD equipment consisting of 3 ALD process modules (PMs) and a wafer transfer module (TM) for oxide and metal deposition with Ozone and Plasma process. Also it will be able to process at high temperature up to 500℃ because of consisting in a high temperature process chamber and apply running program for process integration for various material depositions among multi process chambers continuously.
This supplied ALD equipment has been designing and manufactured with NCD’s originated technologies. NCD expect that the system will contribute very much to the development of new high-end semiconductor technology and technology fusion.
NCD will do all of effect to be the best ALD equipment company with continuous R&D efforts.