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  • Lucida™ TS Series ALD

LucidaTM TS Series ALD

High throughput atomic layer deposition system for Cd free buffer layer of CIGS solar cells

LucidaTMTS series

Lucida™ TS series

Cluster system for LucidaTM TS series

Cluster system for Lucida™ TS series


  • Cd free Buffer layer(ZnS,ZnOS..) of CIGS solar cells
  • Applications of mass-product
  • High throughput :>40 panels/hour (1PM)
  • Substrate size :>900 x 1600mm2


  • Advanced process kit and small volume chamber for short gas cycle times
  • Extremely materialized ALD mechanism
  • Small foot print
  • Totally integrated process module
  • Easy process control

Technical Specifications

Technical Specifications
Model Material Panel Size (mm2) Thickness (nm) Throughput (panel/hour)
LucidaTM TS600 Zn(O,S) >900x1600 30 >40(1PM)
LucidaTM TS600-IN Zn(O,S) >900x1600 30 >120
More information for application and specification for Lucida™ TS series