Global Leader in ALD Technology
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- Lucida™ D series ALD
LucidaTM D series ALD
LucidaTMD300
ALD system for R&D applications
Material：Al₂O₃, HfO₂, ZrO₂, TiO₂,ZnO……………
Substrate size：100~300mm wafer
PC based control system
Global Leader in ALD Technology
LucidaTMD300
ALD system for R&D applications
Material：Al₂O₃, HfO₂, ZrO₂, TiO₂,ZnO……………
Substrate size：100~300mm wafer
PC based control system