High throughput atomic layer deposition system for Cd
free buffer layer of CIGS solar cells |
Applications |
- Cd free Buffer layer(ZnS,ZnOS..) of CIGS solar cells
- Applications of mass-product
- High throughput : > 40 panels/hour (1PM)
- Substrate size : > 900 x 1600㎟
|
Features |
- Advanced process kit and small volume chamber
for short gas cycle times
- Extremely materialize ALD mechanism
- Small foot print
- Totally integrated process module
- Easy process control
|
Technical specifications |
Model |
Material |
Panel size
(mm2) |
Thickness
(nm) |
Throughput
(panel/hour) |
Lucida™ TS600 |
Zn(O,S) |
> 900x1600 |
30 |
>40(1PM) |
Lucida™ TS600-IN |
Zn(O,S) |
> 900x1600 |
30 |
>120 |
|
|
Lucida™ TS series
Cluster system for Lucida™ TS series/div> |