PRODUCTSRoll to RollLucida™ R Series ALD
Lucida™ R Series ALD
Atomic layer deposition system for roll to roll applications
  • Roll to roll ALD process for high moisture barrier films of flexible OLED displays, flexible OLED lightings, quantum dots, flexible solar cells, etc. : Al2O3,TiO2
  • Applications for research and pilot-product
  • Web width: <600mm
  • Advanced process kit for short gas cycle times
  • High barrier property with polymer films
  • Extremely materialize ALD mechanism
  • Easy process control
Technical specifications
Model Material Web width
Lucida™ R 300 Al2O3,TiO2 <300
Lucida™ R 600 Al2O3,TiO2 <600
More information for application and specification for Lucida™ R series ALD