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LucidaTM GD Series ALD
LucidaTMGD730
ALD cluster system for TFE of OLED display
Material: Al₂O₃, TiO₂
Substrate size: ≤ 730 x 920 mm glass
PC based control system
High throughput
LucidaTMGD1500
ALD cluster system for TFE of OLED display
Material: Al₂O₃, TiO₂
Substrate size: ≥ 1500 x 1850 mm glass
PC based control system
High throughput