Global Leader in ALD Technology
High throughput atomic layer deposition system for OLED displays
LucidaTMGD730
Thin film encapsulation for OLED display
Al₂O₃, TiO₂
< 730 x 920 mm glass
High throughput
LucidaTMGD1500
Thin film encapsulation for OLED display
Al₂O₃, TiO₂
> 1500 x 1850 mm glass
High throughput