PRODUCTSSolar cellLucida™ TS Series ALD
Lucida™ TS Series ALD
High throughput atomic layer deposition system for Cd
free buffer layer of CIGS solar cells
  • Cd free Buffer layer(ZnS,ZnOS..) of CIGS solar cells
  • Applications of mass-product
  • High throughput : > 40 panels/hour (1PM)
  • Substrate size : > 900 x 1600㎟
  • Advanced process kit and small volume chamber for short gas cycle times
  • Extremely materialize ALD mechanism
  • Small foot print
  • Totally integrated process module
  • Easy process control
Technical specifications
Model Material Panel size
Lucida™ TS600 Zn(O,S) > 900x1600 30 >40(1PM)
Lucida™ TS600-IN Zn(O,S) > 900x1600 30 >120

Lucida™ TS series

Cluster system for Lucida™ TS series
More information for application and specification for Lucida™ TS series