Global Leader in ALD Technology
- PRODUCTS
- Semiconductor
- Lucida™ S series ALD
LucidaTM S series ALD
New concept high throughput ALD system
Applications
- Ultra thin films for semiconductor applications
: Al2O2, HfO2, ZrO2, TiO2 , SrTiO3 …… - 300mm wafers
- Applications for high throughput
Features
- ALD ultra-thin film with good thickness uniformity and conformal step coverage
- Advanced ALD process kit
- Extremely materialized ALD mechanism
- Small foot print
- Totally integrated process module