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  • Lucida™ R series ALD

LucidaTM R series ALD

Atomic layer deposition system for roll to roll applications

Applications

  • Roll to roll ALD process for high moisture barrier films of flexible OLED displays, flexible OLED lightings, quantum dots, flexible solar cells, etc. : Al2O3, TiO2
  • Applications for research and pilot-product
  • Web width: <600mm

Features

  • Advanced process kit for short gas cycle times
  • High barrier property with polymer films
  • Extremely materialized ALD mechanism
  • Easy process control

Technical Specifications

Technical Specifications
Model Meterial Web Width (mm)
LucidaTM R 300 Al2O3, TiO2 <300
LucidaTM R 600 Al2O3, TiO2 <600