Global Leader in ALD Technology
- PRODUCTS
- Roll to Roll
- Lucida™ R series ALD
LucidaTM R series ALD
Atomic layer deposition system for roll to roll applications
Applications
- Roll to roll ALD process for high moisture barrier films of flexible OLED displays, flexible OLED lightings, quantum dots, flexible solar cells, etc. : Al2O3, TiO2
- Applications for research and pilot-product
- Web width: <600mm
Features
- Advanced process kit for short gas cycle times
- High barrier property with polymer films
- Extremely materialized ALD mechanism
- Easy process control
Technical Specifications
| Model | Material | Web Width (mm) |
|---|---|---|
| LucidaTM R 300 | Al2O3, TiO2 | <300 |
| LucidaTM R 600 | Al2O3, TiO2 | <600 |