Global Leader in ALD Technology

  • 메인
  • PRODUCTS
  • R&D
  • Lucida™ D series ALD

LucidaTM D series ALD

Lucida GS Series
Lucida D

LucidaTMD300

ALD for R&D applications

Al₂O₃, HfO₂, ZrO₂, TiO₂……………

100~300mm wafers