Global Leader in ALD Technology
- PRODUCTS
- R&D
- Lucida™ D series ALD
LucidaTM D series ALD
LucidaTMD300
ALD system for R&D applications
Material：Al₂O₃, HfO₂, ZrO₂, TiO₂, ZnO……………
Substrate size：100~300mm wafer
PC based control system
Global Leader in ALD Technology
LucidaTMD300
ALD system for R&D applications
Material：Al₂O₃, HfO₂, ZrO₂, TiO₂, ZnO……………
Substrate size：100~300mm wafer
PC based control system